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ENEA-Facilities for depostion of TCO by sputtering and MOCVD

[Cheetah Partner]

Development and realization of TCO by Sputtering, MOCVD and by spin coating for rigid and flexible substrates

Technical Info

MAIN FEATURES

The facilities are used to develop and realize

High transparency and high conductivity boron doped zinc oxide thin films deposited by Low Pressure Chemical Vapour Deposition (LP-MOCVD)
Optimisation of the properties uniformity on large area substrate (30 x 30 cm2) by ZnO by sputtering
Development of plasma treatments on LP-CVD deposited ZnO thin films as front electrode of silicon based solarcells in order to optimise the ZnO/p-layer interface quality
Development of thin film silicon based solar cells on LP-CVD zinc oxide.
Use a wider range of characterization methods (SEM, AFM, XRD, Hall effect, and models to analyze films, crystals,interfaces mechanical tests, functional properties, definition of fabrication process.

Alternatives to current TCO materials including carbon-based and ultrathin materials, devoted to flexible devices may be also objective of common research in collaboration with interested CHEETAH /non CHEETAH partners.

The main achieved results concern

ZnO (-4 cm, transmittance > 82%) by sputtering
Patented MOCVD reactor for in line fabrication of boron doped zinc oxide

Furthermore

10^-3 ohm cm range resistivity and transparency 60 % in the visible range with nanocomposited materials approach.More information available at ENEA Infrastucture for OPV
Preliminar studies on p-type TCO were also realized

LIMITATIONS OR CONSTRAINTS:

The access will be allowed with technical and scientific assistance from ENEA in the frame of joint projects or bilateral agreement

TYPICAL SERVICES OR RESULTS

Access to following infractructures:

LP-MOCVD apparatus for large area deposition (30 x 30 cm2) of boron doped zinc oxide.
Glow-discharge RF for TCO plasma treatments
Large area a-Si:H deposition and sputtering for metal contact deposition . (30 x 30 cm2)
Fluid nanocomposite deposition tools (spinning, inkjet)
I-V light Am 1.5 G characterization of solar cells and solar modules by Class A solar simulator up to an 2x2 m2 area
Optical and mechanical / functional tests, all standards SEM, AFM; UV-VIS-NIR , IR spectrophotometer,
Variable angle Spectral Elipsometry
4-probe, Hall effect 4P and Van der Pauw conf., .
High resolution X-ray diffractometer for structural analysis
Angular Resolved Scattering (ARS)